JP2510367Y2 - 膜厚測定装置 - Google Patents

膜厚測定装置

Info

Publication number
JP2510367Y2
JP2510367Y2 JP1990046600U JP4660090U JP2510367Y2 JP 2510367 Y2 JP2510367 Y2 JP 2510367Y2 JP 1990046600 U JP1990046600 U JP 1990046600U JP 4660090 U JP4660090 U JP 4660090U JP 2510367 Y2 JP2510367 Y2 JP 2510367Y2
Authority
JP
Japan
Prior art keywords
film
thickness
measuring device
laser beam
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990046600U
Other languages
English (en)
Japanese (ja)
Other versions
JPH047305U (en]
Inventor
和夫 岸本
清文 久米
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP1990046600U priority Critical patent/JP2510367Y2/ja
Publication of JPH047305U publication Critical patent/JPH047305U/ja
Application granted granted Critical
Publication of JP2510367Y2 publication Critical patent/JP2510367Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP1990046600U 1990-05-02 1990-05-02 膜厚測定装置 Expired - Fee Related JP2510367Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990046600U JP2510367Y2 (ja) 1990-05-02 1990-05-02 膜厚測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990046600U JP2510367Y2 (ja) 1990-05-02 1990-05-02 膜厚測定装置

Publications (2)

Publication Number Publication Date
JPH047305U JPH047305U (en]) 1992-01-23
JP2510367Y2 true JP2510367Y2 (ja) 1996-09-11

Family

ID=31561823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990046600U Expired - Fee Related JP2510367Y2 (ja) 1990-05-02 1990-05-02 膜厚測定装置

Country Status (1)

Country Link
JP (1) JP2510367Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06248778A (ja) * 1993-02-26 1994-09-06 Misawa Ceramics Kk パラペット版下部の取付け構造
JP4852903B2 (ja) * 2005-06-16 2012-01-11 日本ゼオン株式会社 シート状光学積層体の膜厚測定システム及び膜厚測定方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5381151A (en) * 1976-12-27 1978-07-18 Oki Electric Ind Co Ltd Surface film thickness detector
JPS5622903A (en) * 1979-08-01 1981-03-04 Kanai Hiroyuki Measuring instrument for web unevenness

Also Published As

Publication number Publication date
JPH047305U (en]) 1992-01-23

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Legal Events

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LAPS Cancellation because of no payment of annual fees